JPS6237918U - - Google Patents
Info
- Publication number
- JPS6237918U JPS6237918U JP12974685U JP12974685U JPS6237918U JP S6237918 U JPS6237918 U JP S6237918U JP 12974685 U JP12974685 U JP 12974685U JP 12974685 U JP12974685 U JP 12974685U JP S6237918 U JPS6237918 U JP S6237918U
- Authority
- JP
- Japan
- Prior art keywords
- source gas
- source
- light
- vicinity
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 7
- 230000005284 excitation Effects 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12974685U JPS6237918U (en]) | 1985-08-26 | 1985-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12974685U JPS6237918U (en]) | 1985-08-26 | 1985-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237918U true JPS6237918U (en]) | 1987-03-06 |
Family
ID=31026594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12974685U Pending JPS6237918U (en]) | 1985-08-26 | 1985-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237918U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0165129U (en]) * | 1987-10-20 | 1989-04-26 |
-
1985
- 1985-08-26 JP JP12974685U patent/JPS6237918U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0165129U (en]) * | 1987-10-20 | 1989-04-26 |
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